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《大话集成电路23》芯片光刻：精度最高的加工技术，究竟难在哪？
光刻技术，作为集成电路最具有代表性的制作工艺之一，它代表着人类迄今为止精度最高的加工技术。那么这项技术究竟难在哪儿，壁垒又有多高呢？
大话集成电路：中国“芯”的涅槃重生24/95
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